本機はセラミック基板の「ソリ」及び「個片パターンのコプラナリテイ」を三次元画像で合否判定する検査装置です。
特徴
高精度にて三次元検査が可能。 （高さ分解能：１．８μm）
３次元検査視野が広く、検査処理時間の短縮が可能。
検査処理時間が短く、前後工程とのインライン対応が可能。
導通検査ステージをオプションにて取付けることが可能。
トレー to トレー での高速処理を実現。
Rating
44
Translation / English
- Posted at 19 Dec 2013 at 14:53
This unit is the test equipment that determined pass or fail determines in the three-dimensional image "Kopuranaritei of pattern pieces" and "warp" of the ceramic substrate.
Feature
Possible three-dimensional inspection with high accuracy. (Resolution height : 1.8μm )
Three-dimensional field of view inspection is wide, can be shortened processing time of inspection.
Inspection processing time is short, and allow in-line correspondence between before and after the process.
Can be attached with an option to conduct the inspection stage.
Realized the high-speed processing in the tray to tray.
Feature
Possible three-dimensional inspection with high accuracy. (Resolution height : 1.8μm )
Three-dimensional field of view inspection is wide, can be shortened processing time of inspection.
Inspection processing time is short, and allow in-line correspondence between before and after the process.
Can be attached with an option to conduct the inspection stage.
Realized the high-speed processing in the tray to tray.
Rating
41
Translation / English
- Posted at 19 Dec 2013 at 14:22
This unit is the inspection device that determines pass or fail about "warp" and "Kopuranaritei of pattern pieces" of the ceramic substrate by three dimensions image.
Features
It can three-dimensional Examination with high accuracy. (height resolution: 1.8μm)
Field of view in examination by three-dimensional is wide, it can be shortened processing time of Examination.
Processing time of examination is short, and can support by in-line between before and after of the process.
It can attach with the inspection by conduct stage as option.
The high-speed processing in the tray to tray.
Features
It can three-dimensional Examination with high accuracy. (height resolution: 1.8μm)
Field of view in examination by three-dimensional is wide, it can be shortened processing time of Examination.
Processing time of examination is short, and can support by in-line between before and after of the process.
It can attach with the inspection by conduct stage as option.
The high-speed processing in the tray to tray.
